The Unit for Nanofabrication (UNF) provides our researchers with state-of-the-art tools for device fabrication at the micro- and nano-scale. The UNF facilities includes clean rooms complete with instruments for lithography, deposition, etching, and more.
The Peter Brojde Laboratory for miniature integrated systems provides unconventional methodologies for device fabrication. The lab houses a Nanoscribe tool for 3D direct laser writing of objects at the nanoscale.
The Unit for Nanocharacterization (UNC) provides our researchers a broad set of shared instruments for characterizing materials, their properties, features and dimensions.